ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P141001

Precursors or molecules used

Identifies the chemical precursors or molecules utilized in the ALD/ALE process to deposit or etch material layers.

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C85002
• http://orkg.org/orkg/shapes/orkgc_Contribution