ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P180012

ALD scheme (precursors)

The precursor pair(s) used in the ALD process (e.g., TMA/H₂O, TEOS/H₂O, TiCl₄/NH₃).

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C120003
• http://orkg.org/orkg/shapes/orkgc_Contribution