ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P180017

ALD reactants (precursors)

The precursor pairs used in the ALD process (e.g., TMA/H₂O, TMA/O₃, TiCl₄/H₂O, DEZ/H₂O)

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C120004
• http://orkg.org/orkg/shapes/orkgc_Contribution