go to ORKG: http://orkg.org/orkg/predicate/P180019
Growth per cycle (GPC) [nm]
The reported GPC value for the ALD process in nanometers per cycle (classified as “slow” < 0.4 nm, “average” 0.4–1.0 nm, “fast” > 1.0 nm).
The reported GPC value for the ALD process in nanometers per cycle (classified as “slow” < 0.4 nm, “average” 0.4–1.0 nm, “fast” > 1.0 nm).