ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P180027

Host material

Material matrix used for ALD thin film (e.g., ZnS, Al₂O₃).

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C120005
• http://orkg.org/orkg/shapes/orkgc_Contribution