ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P180039

metal precursor

Rare-earth metal precursor used in the ALD/MLD process (e.g., Y(thd)₃, Ce(dpdmg)₃).

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C120007
• http://orkg.org/orkg/shapes/orkgc_Contribution