go to ORKG: http://orkg.org/orkg/shapes/orkgc_C120001
- nodeKinde
- http://www.w3.org/ns/shacl#BlankNodeOrIRI
- targetClass
- Sticking coefficients of TMA and H₂O in ALD Al₂O₃ on LHAR structures [C] (http://orkg.org/orkg/class/C120001)
| property (shacl:path) | shacl:nodeKind | shacl:datatype (Literal) | shacl:class (IRI) |
|---|---|---|---|
| Reactor (orkgp:P180007) | shacl:IRI | (http://orkg.org/orkg/class/Resource) | |
| LHAR type (orkgp:P180003) | shacl:IRI | (http://orkg.org/orkg/class/Resource) | |
| Sticking coefficient of TMA (cTMA) (orkgp:P180008) | shacl:Literal | ||
| research problem (orkgp:P32) | |||
| Number of ALD cycles (orkgp:P180006) | shacl:Literal | xsd:integer | |
| Sticking coefficient of H₂O (cH₂O) (orkgp:P180009) | shacl:Literal | ||
| Maximum aspect ratio (AR) (orkgp:P180005) | shacl:Literal | xsd:string | |
| Temperature (°C) (orkgp:P37561) | shacl:Literal | ||
| (http://www.w3.org/2000/01/rdf-schema#label) | shacl:Literal | xsd:string | |
| LHAR height (µm) (orkgp:P180004) | shacl:Literal |