go to ORKG: http://orkg.org/orkg/shapes/orkgc_C99006
nodeKinde
http://www.w3.org/ns/shacl#BlankNodeOrIRI
targetClass
ALD Film Properties [C] (http://orkg.org/orkg/class/C99006)
properties
property (shacl:path) shacl:nodeKind shacl:datatype (Literal) shacl:class (IRI)
thickness control (orkgp:P156015) shacl:Literal xsd:string
surface roughness (orkgp:P141010) shacl:Literal xsd:string
refractive index (orkgp:P141006) shacl:Literal xsd:string
film density (orkgp:P141005) shacl:Literal xsd:string
material (orkgp:P156014) shacl:IRI
conformality (orkgp:P156017) shacl:Literal xsd:string
film thickness (orkgp:P141004) shacl:Literal xsd:string
(http://www.w3.org/2000/01/rdf-schema#label) shacl:Literal xsd:string