go to ORKG: http://orkg.org/orkg/shapes/orkgc_C99006
- nodeKinde
- http://www.w3.org/ns/shacl#BlankNodeOrIRI
- targetClass
- ALD Film Properties [C] (http://orkg.org/orkg/class/C99006)
| property (shacl:path) | shacl:nodeKind | shacl:datatype (Literal) | shacl:class (IRI) |
|---|---|---|---|
| thickness control (orkgp:P156015) | shacl:Literal | xsd:string | |
| surface roughness (orkgp:P141010) | shacl:Literal | xsd:string | |
| refractive index (orkgp:P141006) | shacl:Literal | xsd:string | |
| film density (orkgp:P141005) | shacl:Literal | xsd:string | |
| material (orkgp:P156014) | shacl:IRI | ||
| conformality (orkgp:P156017) | shacl:Literal | xsd:string | |
| film thickness (orkgp:P141004) | shacl:Literal | xsd:string | |
| (http://www.w3.org/2000/01/rdf-schema#label) | shacl:Literal | xsd:string |