ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P180013

Deposition temperature [°C]

The substrate temperature at which the ALD process was performed, given in degrees Celsius (may be a single value, a range, or RT = room temperature).

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C120004
• http://orkg.org/orkg/shapes/orkgc_C120008
• http://orkg.org/orkg/shapes/orkgc_C120007
• http://orkg.org/orkg/shapes/orkgc_C120003
• http://orkg.org/orkg/shapes/orkgc_Contribution