go to ORKG: http://orkg.org/orkg/shapes/orkgc_C120008
nodeKinde
http://www.w3.org/ns/shacl#BlankNodeOrIRI
targetClass
ALD Processes Based on Rare Earth Elements [C] (http://orkg.org/orkg/class/C120008)
properties
property (shacl:path) shacl:nodeKind shacl:datatype (Literal) shacl:class (IRI)
Precursor 1 (orkgp:P180042) shacl:IRI (http://orkg.org/orkg/class/Resource)
Deposition temperature [°C] (orkgp:P180013) shacl:Literal
research problem (orkgp:P32)
Precursor 2 (orkgp:P180043) shacl:IRI (http://orkg.org/orkg/class/Resource)
Material (orkgp:P9071) shacl:IRI (http://orkg.org/orkg/class/Resource)
Growth per cycle (GPC) [Å] (orkgp:P180041) shacl:Literal
(http://www.w3.org/2000/01/rdf-schema#label) shacl:Literal xsd:string