ORKG Shapes

go to ORKG: http://orkg.org/orkg/predicate/P9071

Material

Specifies the type of material being deposited or etched using Atomic Layer Deposition/Etching techniques.

• http://orkg.org/orkg/shapes/orkgc_Resource
• http://orkg.org/orkg/shapes/orkgc_C85002
• http://orkg.org/orkg/shapes/orkgc_C120008
• http://orkg.org/orkg/shapes/orkgc_C91002
• http://orkg.org/orkg/shapes/orkgc_Contribution